Piezoelectric micropump with nanoliter per minute flow for drug delivery systems
Piezoelectric Actuated Valveless Micropump (PAVM) has been designed and successfully fabricated using MEMS fabrication processes. The micropump uses a PZT: Pb(ZrTi)Ox ceramic plate to actuate a silicon membrane which bends when a voltage is applied to the piezoelectric actuator. The resultant recipr...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Kebangsaan Malaysia
2011
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| Online Access: | http://journalarticle.ukm.my/709/1/13_Juliana.pdf |