Structural properties of zinc oxide thin films deposited on various substrates

Structural properties of zinc oxide thin films deposited on various substrates

In this work, the structural properties of radio frequency sputtering-grown zinc oxide (ZnO) thin films on sapphire (Al2O3), gallium arsenide (GaAs) and n-type silicon (Si) substrates were characterized. Scanning electron microscopy was employed to study the surface morphology of the samples. X-ray...

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Bibliographic Details
Main Authors:	C.G., Ching, P.K., Ooi, S.S., Ng, Hassan, Z., Abu Hassan, H., Abdullah, M.J.
Format:	Article
Language:	English
Published:	Universiti Kebangsaan Malaysia 2014
Online Access:	http://journalarticle.ukm.my/7183/1/16_C.G._Ching.pdf

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