Structural and optical properties of nc-Si:H thin films deposited by layer-by-layer technique
Hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited on c-Si and quartz substrates by layerby-layer (LBL) technique using radio-frequency plasma enhanced chemical vapour deposition system. The effects of rf power on the interlayer elemental profiling, structural and optical propert...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2014
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/10619/1/00006469_100296.pdf |