Enhancement of optical transmittance and electrical resistivity of post-annealed ITO thin films RF sputtered on Si
This paper reports on the enhancement of optical transmittance and electrical resistivity of indium tin oxide (ITO) transparent conductive oxides (TCO) deposited by radio frequency (RF) sputtering on Si substrate. Post-annealing was conducted on the samples at temperature ranges of 500–700 °C. From...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Published: |
Elsevier
2018
|
| Subjects: |