Effects of pressure and substrate temperature on the growth of Al-doped ZnO films by pulsed laser deposition
Al-doped ZnO (AZO) thin films were deposited on p-Si (100) by pulsed laser deposition from a composite ceramic target (ZnO:Al2O3) by using 355 nm laser at different O2 background pressure and substrate temperature. Upon ablation at laser fluence of 2 Jcm-2, plasma plume consists of Zn neutrals and i...
Main Authors: | Kek, Reeson, Tan, Kwan Chu, Nee, Chen Hon, Yap, Seong Ling, Koh, Song Foo, Arof, Abdul Kariem, Tou, Teck Yong, Yap, Seong Shan |
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格式: | 文件 |
出版: |
IOP Publishing
2020
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