Effects of pressure and substrate temperature on the growth of Al-doped ZnO films by pulsed laser deposition

Effects of pressure and substrate temperature on the growth of Al-doped ZnO films by pulsed laser deposition

Al-doped ZnO (AZO) thin films were deposited on p-Si (100) by pulsed laser deposition from a composite ceramic target (ZnO:Al2O3) by using 355 nm laser at different O2 background pressure and substrate temperature. Upon ablation at laser fluence of 2 Jcm-2, plasma plume consists of Zn neutrals and i...

书目详细资料
Main Authors:	Kek, Reeson, Tan, Kwan Chu, Nee, Chen Hon, Yap, Seong Ling, Koh, Song Foo, Arof, Abdul Kariem, Tou, Teck Yong, Yap, Seong Shan
格式:	文件
出版:	IOP Publishing 2020
主题:	QC Physics

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