Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering
This study mainly aims to evaluate the intermixing between layers during the deposition of dielectric/metal/dielectric nanoscale multilayer coatings. TiO(2) and WO(3) films as dielectric materials are developed using radio frequency reactive magnetron sputtering on unheated soda lime glass substrate...
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| Format: | Article |
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Maney Publishing
2011
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| _version_ | 1825719112822685696 |
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| author | Hasan, M.M. Haseeb, A.S. Md. Abdul Masjuki, Haji Hassan |
| author_facet | Hasan, M.M. Haseeb, A.S. Md. Abdul Masjuki, Haji Hassan |
| author_sort | Hasan, M.M. |
| collection | UM |
| description | This study mainly aims to evaluate the intermixing between layers during the deposition of dielectric/metal/dielectric nanoscale multilayer coatings. TiO(2) and WO(3) films as dielectric materials are developed using radio frequency reactive magnetron sputtering on unheated soda lime glass substrates. Ag films are grown using radio frequency argon sputtering. Auger electron spectroscopy and ultraviolet-visible-near infrared spectrometry are employed to estimate the degree of layer intermixing in TiO(2)/Ag, WO(3)/Ag, TiO(2)/Ag/TiO(2) and WO(3)/Ag/WO(3) films. The morphological properties are also investigated under a field emission scanning electron microscope and an atomic force microscope. The transmittance curves for bilayer films exhibited heat mirror effects significantly. However, multilayer films showed a little amount of heat mirror effects. Auger electron spectroscopy depth profiles confirmed a minor diffusion of Ag at the TiO(2)/Ag interface. However, significant interactions of WO(3) with Ag were observed for the WO(3)/Ag film. Besides, severe intermixing and oxidation of Ag films were observed for the multilayer films. |
| first_indexed | 2024-03-06T05:14:41Z |
| format | Article |
| id | um.eprints-5557 |
| institution | Universiti Malaya |
| last_indexed | 2024-03-06T05:14:41Z |
| publishDate | 2011 |
| publisher | Maney Publishing |
| record_format | dspace |
| spelling | um.eprints-55572018-10-18T03:17:06Z http://eprints.um.edu.my/5557/ Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering Hasan, M.M. Haseeb, A.S. Md. Abdul Masjuki, Haji Hassan TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery This study mainly aims to evaluate the intermixing between layers during the deposition of dielectric/metal/dielectric nanoscale multilayer coatings. TiO(2) and WO(3) films as dielectric materials are developed using radio frequency reactive magnetron sputtering on unheated soda lime glass substrates. Ag films are grown using radio frequency argon sputtering. Auger electron spectroscopy and ultraviolet-visible-near infrared spectrometry are employed to estimate the degree of layer intermixing in TiO(2)/Ag, WO(3)/Ag, TiO(2)/Ag/TiO(2) and WO(3)/Ag/WO(3) films. The morphological properties are also investigated under a field emission scanning electron microscope and an atomic force microscope. The transmittance curves for bilayer films exhibited heat mirror effects significantly. However, multilayer films showed a little amount of heat mirror effects. Auger electron spectroscopy depth profiles confirmed a minor diffusion of Ag at the TiO(2)/Ag interface. However, significant interactions of WO(3) with Ag were observed for the WO(3)/Ag film. Besides, severe intermixing and oxidation of Ag films were observed for the multilayer films. Maney Publishing 2011 Article PeerReviewed Hasan, M.M. and Haseeb, A.S. Md. Abdul and Masjuki, Haji Hassan (2011) Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering. Surface Engineering, 27 (5). pp. 382-388. ISSN 0267-0844, DOI https://doi.org/10.1179/1743294410Y.0000000014 <https://doi.org/10.1179/1743294410Y.0000000014>. https://doi.org/10.1179/1743294410Y.0000000014 doi:10.1179/1743294410Y.0000000014 |
| spellingShingle | TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery Hasan, M.M. Haseeb, A.S. Md. Abdul Masjuki, Haji Hassan Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering |
| title | Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering |
| title_full | Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering |
| title_fullStr | Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering |
| title_full_unstemmed | Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering |
| title_short | Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering |
| title_sort | intermixing of metal oxide ag metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering |
| topic | TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery |
| work_keys_str_mv | AT hasanmm intermixingofmetaloxideagmetaloxidenanoscalemultilayerspreparedbyrfreactivemagnetronsputtering AT haseebasmdabdul intermixingofmetaloxideagmetaloxidenanoscalemultilayerspreparedbyrfreactivemagnetronsputtering AT masjukihajihassan intermixingofmetaloxideagmetaloxidenanoscalemultilayerspreparedbyrfreactivemagnetronsputtering |