Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering
This study mainly aims to evaluate the intermixing between layers during the deposition of dielectric/metal/dielectric nanoscale multilayer coatings. TiO(2) and WO(3) films as dielectric materials are developed using radio frequency reactive magnetron sputtering on unheated soda lime glass substrate...
Main Authors: | , , |
---|---|
Format: | Article |
Published: |
Maney Publishing
2011
|
Subjects: |