LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath
Ammonia-citrate bath has been investigated for the deposition of nano crystalline Ni - W alloy micro components using the LIGA process. First the bath stability and deposit characteristics were studied. Fabrication of micro specimens were then carried out on silicon substrates covered with novolac a...
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| Format: | Article |
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Springer Verlag (Germany)
2008
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| _version_ | 1796945336051171328 |
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| author | Haseeb, A.S. Md. Abdul Bade, Klaus |
| author_facet | Haseeb, A.S. Md. Abdul Bade, Klaus |
| author_sort | Haseeb, A.S. Md. Abdul |
| collection | UM |
| description | Ammonia-citrate bath has been investigated for the deposition of nano crystalline Ni - W alloy micro components using the LIGA process. First the bath stability and deposit characteristics were studied. Fabrication of micro specimens were then carried out on silicon substrates covered with novolac as well as thick PMMA resist for LIGA. Effects of different parameters like current density, nickel ion and tungsten ion concentration in the bath, deposition time etc. on the deposit characteristics and current efficiency were studied. The deposited Ni - W samples were characterized by scanning electron microscopy, energy depressive X-ray spectroscopy, light optical microscopy and X-ray diffraction. Results show that during a few tens of hours of deposition, ammonia loss from the covered bath used is minimal and the bath remains stable. Selection of proper bath and deposition parameters allows a window for the deposition of crack free, thick, nano crystalline nickel-tungsten alloys. Using the optimum parameters, it has been possible to fabricate Ni-12 at W micro tensile specimens with a nominal thickness of 120 mu m by the LIGA process. |
| first_indexed | 2024-03-06T05:15:08Z |
| format | Article |
| id | um.eprints-5750 |
| institution | Universiti Malaya |
| last_indexed | 2024-03-06T05:15:08Z |
| publishDate | 2008 |
| publisher | Springer Verlag (Germany) |
| record_format | dspace |
| spelling | um.eprints-57502018-10-16T04:52:41Z http://eprints.um.edu.my/5750/ LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath Haseeb, A.S. Md. Abdul Bade, Klaus TA Engineering (General). Civil engineering (General) Ammonia-citrate bath has been investigated for the deposition of nano crystalline Ni - W alloy micro components using the LIGA process. First the bath stability and deposit characteristics were studied. Fabrication of micro specimens were then carried out on silicon substrates covered with novolac as well as thick PMMA resist for LIGA. Effects of different parameters like current density, nickel ion and tungsten ion concentration in the bath, deposition time etc. on the deposit characteristics and current efficiency were studied. The deposited Ni - W samples were characterized by scanning electron microscopy, energy depressive X-ray spectroscopy, light optical microscopy and X-ray diffraction. Results show that during a few tens of hours of deposition, ammonia loss from the covered bath used is minimal and the bath remains stable. Selection of proper bath and deposition parameters allows a window for the deposition of crack free, thick, nano crystalline nickel-tungsten alloys. Using the optimum parameters, it has been possible to fabricate Ni-12 at W micro tensile specimens with a nominal thickness of 120 mu m by the LIGA process. Springer Verlag (Germany) 2008 Article PeerReviewed Haseeb, A.S. Md. Abdul and Bade, Klaus (2008) LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath. Microsystem Technologies, 14 (3). pp. 379-388. ISSN 0946-7076, DOI https://doi.org/10.1007/s00542-007-0447-5 <https://doi.org/10.1007/s00542-007-0447-5>. https://doi.org/10.1007/s00542-007-0447-5 doi:10.1007/s00542-007-0447-5 |
| spellingShingle | TA Engineering (General). Civil engineering (General) Haseeb, A.S. Md. Abdul Bade, Klaus LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath |
| title | LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath |
| title_full | LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath |
| title_fullStr | LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath |
| title_full_unstemmed | LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath |
| title_short | LIGA fabrication of nanocrystalline Ni–W alloy micro specimens from ammonia-citrate bath |
| title_sort | liga fabrication of nanocrystalline ni w alloy micro specimens from ammonia citrate bath |
| topic | TA Engineering (General). Civil engineering (General) |
| work_keys_str_mv | AT haseebasmdabdul ligafabricationofnanocrystallineniwalloymicrospecimensfromammoniacitratebath AT badeklaus ligafabricationofnanocrystallineniwalloymicrospecimensfromammoniacitratebath |