Adhesion and wear behavior of nanostructured titanium oxide thin films

This study aims to investigate structural, mechanical and tribological properties of titanium oxide films deposited on glass substrates by radio frequency (RF) magnetron sputtering. All the as-grown titania films possess the anatase structure having a grain size of about 44 nm irrespective of the va...

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Main Authors: Hasan, M.M., Haseeb, A.S. Md. Abdul, Masjuki, Haji Hassan, Saidur, Rahman
Format: Article
Language:English
Published: International Journal of Mechanical and Materials Engineering 2010
Subjects:
Online Access:http://eprints.um.edu.my/6768/1/Adhesion_and_wear_behavior_of_nanostructured_titanium_oxide_thin_films.pdf
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author Hasan, M.M.
Haseeb, A.S. Md. Abdul
Masjuki, Haji Hassan
Saidur, Rahman
author_facet Hasan, M.M.
Haseeb, A.S. Md. Abdul
Masjuki, Haji Hassan
Saidur, Rahman
author_sort Hasan, M.M.
collection UM
description This study aims to investigate structural, mechanical and tribological properties of titanium oxide films deposited on glass substrates by radio frequency (RF) magnetron sputtering. All the as-grown titania films possess the anatase structure having a grain size of about 44 nm irrespective of the variation of substrate temperatures. AFM images show a nodular morphology with an increase of surface roughness. From micro-scratch tests, the optical micrographs of the scratch tracks show that the complete delamination of TiO 2 films deposited at higher temperatures appear at a higher value of adhesion critical loads. The highest adhesion critical load between titanium oxide films and glass was found to be 2.24 N for the film prepared at 300 °C. It represents an enhanced adhesion strength for films deposited at higher temperatures. Scratch hardness was also found to increase from 5.5 to 8.4 GPa with increasing substrate temperature. From micro-wear test, it is found that the wear resistance of TiO 2 films deposited at higher substrate temperatures exhibits higher wear resistance.
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spelling um.eprints-67682018-10-18T03:54:04Z http://eprints.um.edu.my/6768/ Adhesion and wear behavior of nanostructured titanium oxide thin films Hasan, M.M. Haseeb, A.S. Md. Abdul Masjuki, Haji Hassan Saidur, Rahman TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery This study aims to investigate structural, mechanical and tribological properties of titanium oxide films deposited on glass substrates by radio frequency (RF) magnetron sputtering. All the as-grown titania films possess the anatase structure having a grain size of about 44 nm irrespective of the variation of substrate temperatures. AFM images show a nodular morphology with an increase of surface roughness. From micro-scratch tests, the optical micrographs of the scratch tracks show that the complete delamination of TiO 2 films deposited at higher temperatures appear at a higher value of adhesion critical loads. The highest adhesion critical load between titanium oxide films and glass was found to be 2.24 N for the film prepared at 300 °C. It represents an enhanced adhesion strength for films deposited at higher temperatures. Scratch hardness was also found to increase from 5.5 to 8.4 GPa with increasing substrate temperature. From micro-wear test, it is found that the wear resistance of TiO 2 films deposited at higher substrate temperatures exhibits higher wear resistance. International Journal of Mechanical and Materials Engineering 2010 Article PeerReviewed application/pdf en http://eprints.um.edu.my/6768/1/Adhesion_and_wear_behavior_of_nanostructured_titanium_oxide_thin_films.pdf Hasan, M.M. and Haseeb, A.S. Md. Abdul and Masjuki, Haji Hassan and Saidur, Rahman (2010) Adhesion and wear behavior of nanostructured titanium oxide thin films. International Journal of Mechanical and Materials Engineering, 5 (1). pp. 5-10. ISSN 1823-0334, http://www.scopus.com/inward/record.url?eid=2-s2.0-77952993599&partnerID=40&md5=ba75b85db3b8f2ed76cf43546f8be315
spellingShingle TA Engineering (General). Civil engineering (General)
TJ Mechanical engineering and machinery
Hasan, M.M.
Haseeb, A.S. Md. Abdul
Masjuki, Haji Hassan
Saidur, Rahman
Adhesion and wear behavior of nanostructured titanium oxide thin films
title Adhesion and wear behavior of nanostructured titanium oxide thin films
title_full Adhesion and wear behavior of nanostructured titanium oxide thin films
title_fullStr Adhesion and wear behavior of nanostructured titanium oxide thin films
title_full_unstemmed Adhesion and wear behavior of nanostructured titanium oxide thin films
title_short Adhesion and wear behavior of nanostructured titanium oxide thin films
title_sort adhesion and wear behavior of nanostructured titanium oxide thin films
topic TA Engineering (General). Civil engineering (General)
TJ Mechanical engineering and machinery
url http://eprints.um.edu.my/6768/1/Adhesion_and_wear_behavior_of_nanostructured_titanium_oxide_thin_films.pdf
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