Effects of annealing treatment on optical properties of anatase TiO2 thin films

In this investigation, anatase TiO2 thin films were grown by radio frequency magnetron sputtering on glass substrates at a high sputtering pressure and room temperature. The anatase films were then annealed at 300-600 °C in air for a period of 1 hour. To examine the structure and morphology of the...

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Главные авторы: Hasan, M.M., Haseeb, A.S. Md. Abdul, Saidur, Rahman, Masjuki, Haji Hassan
Формат: Статья
Опубликовано: World Academy of Science, Engineering and Technology (WASET) 2008
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_version_ 1825719286479454208
author Hasan, M.M.
Haseeb, A.S. Md. Abdul
Saidur, Rahman
Masjuki, Haji Hassan
author_facet Hasan, M.M.
Haseeb, A.S. Md. Abdul
Saidur, Rahman
Masjuki, Haji Hassan
author_sort Hasan, M.M.
collection UM
description In this investigation, anatase TiO2 thin films were grown by radio frequency magnetron sputtering on glass substrates at a high sputtering pressure and room temperature. The anatase films were then annealed at 300-600 °C in air for a period of 1 hour. To examine the structure and morphology of the films, X-ray diffraction (XRD) and atomic force microscopy (AFM) methods were used respectively. From X-ray diffraction patterns of the TiO 2 films, it was found that the as-deposited film showed some differences compared with the annealed films and the intensities of the peaks of the crystalline phase increased with the increase of annealing temperature. From AFM images, the distinct variations in the morphology of the thin films were also observed. The optical constants were characterized using the transmission spectra of the films obtained by UV-VIS-IR spectrophotometer. Besides, optical thickness of the film deposited at room temperature was calculated
first_indexed 2024-03-06T05:17:21Z
format Article
id um.eprints-6864
institution Universiti Malaya
last_indexed 2024-03-06T05:17:21Z
publishDate 2008
publisher World Academy of Science, Engineering and Technology (WASET)
record_format dspace
spelling um.eprints-68642019-10-25T06:05:16Z http://eprints.um.edu.my/6864/ Effects of annealing treatment on optical properties of anatase TiO2 thin films Hasan, M.M. Haseeb, A.S. Md. Abdul Saidur, Rahman Masjuki, Haji Hassan TA Engineering (General). Civil engineering (General) TJ Mechanical engineering and machinery In this investigation, anatase TiO2 thin films were grown by radio frequency magnetron sputtering on glass substrates at a high sputtering pressure and room temperature. The anatase films were then annealed at 300-600 °C in air for a period of 1 hour. To examine the structure and morphology of the films, X-ray diffraction (XRD) and atomic force microscopy (AFM) methods were used respectively. From X-ray diffraction patterns of the TiO 2 films, it was found that the as-deposited film showed some differences compared with the annealed films and the intensities of the peaks of the crystalline phase increased with the increase of annealing temperature. From AFM images, the distinct variations in the morphology of the thin films were also observed. The optical constants were characterized using the transmission spectra of the films obtained by UV-VIS-IR spectrophotometer. Besides, optical thickness of the film deposited at room temperature was calculated World Academy of Science, Engineering and Technology (WASET) 2008 Article PeerReviewed Hasan, M.M. and Haseeb, A.S. Md. Abdul and Saidur, Rahman and Masjuki, Haji Hassan (2008) Effects of annealing treatment on optical properties of anatase TiO2 thin films. International Journal of Chemical and Biological Engineering, 1. pp. 1-5. ISSN 2010-3867, https://waset.org/publications/3164/effects-of-annealing-treatment-on-optical-properties-of-anatase-tio2-thin-films
spellingShingle TA Engineering (General). Civil engineering (General)
TJ Mechanical engineering and machinery
Hasan, M.M.
Haseeb, A.S. Md. Abdul
Saidur, Rahman
Masjuki, Haji Hassan
Effects of annealing treatment on optical properties of anatase TiO2 thin films
title Effects of annealing treatment on optical properties of anatase TiO2 thin films
title_full Effects of annealing treatment on optical properties of anatase TiO2 thin films
title_fullStr Effects of annealing treatment on optical properties of anatase TiO2 thin films
title_full_unstemmed Effects of annealing treatment on optical properties of anatase TiO2 thin films
title_short Effects of annealing treatment on optical properties of anatase TiO2 thin films
title_sort effects of annealing treatment on optical properties of anatase tio2 thin films
topic TA Engineering (General). Civil engineering (General)
TJ Mechanical engineering and machinery
work_keys_str_mv AT hasanmm effectsofannealingtreatmentonopticalpropertiesofanatasetio2thinfilms
AT haseebasmdabdul effectsofannealingtreatmentonopticalpropertiesofanatasetio2thinfilms
AT saidurrahman effectsofannealingtreatmentonopticalpropertiesofanatasetio2thinfilms
AT masjukihajihassan effectsofannealingtreatmentonopticalpropertiesofanatasetio2thinfilms