Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique

The effects of applying a positive bias of 25 to 100 V on the optical, structural and photoluminescence (PL) properties of hydrogenated nanocrystalline silicon (nc-Si:H) films produced by layer-by-layer (LBL) deposition technique has been studied. Optical characterization of the films has been obtai...

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Main Authors: Tong, G.B., Gani, S.M.A., Muhamad, M.R., Rahman, S.A.
Format: Article
Published: 2009
Subjects:
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author Tong, G.B.
Gani, S.M.A.
Muhamad, M.R.
Rahman, S.A.
author_facet Tong, G.B.
Gani, S.M.A.
Muhamad, M.R.
Rahman, S.A.
author_sort Tong, G.B.
collection UM
description The effects of applying a positive bias of 25 to 100 V on the optical, structural and photoluminescence (PL) properties of hydrogenated nanocrystalline silicon (nc-Si:H) films produced by layer-by-layer (LBL) deposition technique has been studied. Optical characterization of the films has been obtained from UV-VIS-NIR spectroscopy measurements. Structural characterization has been performed using X-ray diffraction, micro-Raman spectroscopy and field emission scanning electron microscope (FESEM). PL spectroscopy technique has been used to investigate the PL properties of the films. In general, the films formed shows a mixed phase of silicon (Si) nanocrystallites embedded within an amorphous phase of the Si matrix. The crystalline volume fraction and grain size of the Si nanocrystallites have been shown to be strongly dependent on the applied bias voltage. High applied bias voltage enhances the growth rate of the films but reduces the refractive index and the optical energy gap of the films. Higher crystalline volume fraction of the films prepared at low bias voltages exhibits room temperature PL at around 1.8 eV (700 nm). (c) 2009 Elsevier B.V. All rights reserved.
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spelling um.eprints-73602014-12-26T01:01:34Z http://eprints.um.edu.my/7360/ Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique Tong, G.B. Gani, S.M.A. Muhamad, M.R. Rahman, S.A. QC Physics The effects of applying a positive bias of 25 to 100 V on the optical, structural and photoluminescence (PL) properties of hydrogenated nanocrystalline silicon (nc-Si:H) films produced by layer-by-layer (LBL) deposition technique has been studied. Optical characterization of the films has been obtained from UV-VIS-NIR spectroscopy measurements. Structural characterization has been performed using X-ray diffraction, micro-Raman spectroscopy and field emission scanning electron microscope (FESEM). PL spectroscopy technique has been used to investigate the PL properties of the films. In general, the films formed shows a mixed phase of silicon (Si) nanocrystallites embedded within an amorphous phase of the Si matrix. The crystalline volume fraction and grain size of the Si nanocrystallites have been shown to be strongly dependent on the applied bias voltage. High applied bias voltage enhances the growth rate of the films but reduces the refractive index and the optical energy gap of the films. Higher crystalline volume fraction of the films prepared at low bias voltages exhibits room temperature PL at around 1.8 eV (700 nm). (c) 2009 Elsevier B.V. All rights reserved. 2009 Article PeerReviewed Tong, G.B. and Gani, S.M.A. and Muhamad, M.R. and Rahman, S.A. (2009) Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique. Thin Solid Films, 517 (17). pp. 4945-4949. ISSN 0040-6090, DOI https://doi.org/10.1016/j.tsf.2009.03.066 <https://doi.org/10.1016/j.tsf.2009.03.066>. 10.1016/j.tsf.2009.03.066
spellingShingle QC Physics
Tong, G.B.
Gani, S.M.A.
Muhamad, M.R.
Rahman, S.A.
Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique
title Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique
title_full Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique
title_fullStr Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique
title_full_unstemmed Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique
title_short Influence of bias voltage on the optical and structural properties of nc-Si:H films grown by layer-by-layer (LBL) deposition technique
title_sort influence of bias voltage on the optical and structural properties of nc si h films grown by layer by layer lbl deposition technique
topic QC Physics
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