The effects of neutral gas heating on H mode transition and maintenance currents in a 13.56 MHz planar coil inductively coupled plasma reactor
The H mode transition and maintenance currents in a 13.56 MHz laboratory 6 turn planar coil inductively coupled plasma (ICP) reactor are simulated for low pressure argon discharge range of 0.02-0.3 mbar with neutral gas heating and at ambient temperature. An experimentally fitted 3D power evolution...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2012
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| Online Access: | http://eprints.um.edu.my/7711/1/The_effects_of_neutral_gas_heating_on_H_mode_transition_and_maintenance_currents_in_a_13.56_MHz_planar_coil_inductively_coupled_plasma_reactor.pdf |