Determination of design parameters of a biosensor for human artery pulse wave detection
This paper describes the modeling of a microdiaphragm of a human artery biosensor by varying diaphragm's diameter and thickness. Both parameters are varied to evaluate their effects on diaphragm's deflection and pressure sensitivity. The sensor used circular silicon nitride diaphragm as a...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/9271/1/Determination_of_Design_Parameters_of_a_Biosensor_for_Human_Artery_Pulse_Wave_Detection.pdf |