Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor

A Surface Acoustic Wave (SAW) gas sensor is designed and tested in this paper. The objective of the designed SAW Gas sensor is to detect H2S and NOX gases. The inter-digital transducers (IDT) antennas in the proposed sensor are coated with thin film WO3, which mass is sensitive to mentioned gas conc...

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Main Authors: Moghavvemi, M., Attaran, A.
Format: Article
Published: IFSA 2011
Subjects:
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author Moghavvemi, M.
Attaran, A.
author_facet Moghavvemi, M.
Attaran, A.
author_sort Moghavvemi, M.
collection UM
description A Surface Acoustic Wave (SAW) gas sensor is designed and tested in this paper. The objective of the designed SAW Gas sensor is to detect H2S and NOX gases. The inter-digital transducers (IDT) antennas in the proposed sensor are coated with thin film WO3, which mass is sensitive to mentioned gas concentrations upon close contact. The changes in WO3 mass are registered as frequency shift from 300 to 500 MHz. The sensor blocks are simulated, fabricated and tested for an operating frequency of 300 MHz to 350 MHz. A relatively linear response is achieved with a step of 0.1 V for 10 MHz step frequency shift emitted from WO3 coated IDTs. This fully integrated signal processing circuitry designed by 0.18 um CMOS process is simple, cost effective, small in size, has low power consumption, and fast real-time operation response as well.
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spelling um.eprints-97152017-11-23T03:20:18Z http://eprints.um.edu.my/9715/ Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor Moghavvemi, M. Attaran, A. TA Engineering (General). Civil engineering (General) A Surface Acoustic Wave (SAW) gas sensor is designed and tested in this paper. The objective of the designed SAW Gas sensor is to detect H2S and NOX gases. The inter-digital transducers (IDT) antennas in the proposed sensor are coated with thin film WO3, which mass is sensitive to mentioned gas concentrations upon close contact. The changes in WO3 mass are registered as frequency shift from 300 to 500 MHz. The sensor blocks are simulated, fabricated and tested for an operating frequency of 300 MHz to 350 MHz. A relatively linear response is achieved with a step of 0.1 V for 10 MHz step frequency shift emitted from WO3 coated IDTs. This fully integrated signal processing circuitry designed by 0.18 um CMOS process is simple, cost effective, small in size, has low power consumption, and fast real-time operation response as well. IFSA 2011-02 Article PeerReviewed Moghavvemi, M. and Attaran, A. (2011) Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor. Sensors and Transducers, 125 (2). pp. 22-29. ISSN 17265479,
spellingShingle TA Engineering (General). Civil engineering (General)
Moghavvemi, M.
Attaran, A.
Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor
title Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor
title_full Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor
title_fullStr Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor
title_full_unstemmed Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor
title_short Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor
title_sort design of a low voltage 0 18 um cmos surface acoustic wave gas sensor
topic TA Engineering (General). Civil engineering (General)
work_keys_str_mv AT moghavvemim designofalowvoltage018umcmossurfaceacousticwavegassensor
AT attarana designofalowvoltage018umcmossurfaceacousticwavegassensor