Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor

Design of a low voltage 0.18 um CMOS Surface Acoustic Wave gas sensor

A Surface Acoustic Wave (SAW) gas sensor is designed and tested in this paper. The objective of the designed SAW Gas sensor is to detect H2S and NOX gases. The inter-digital transducers (IDT) antennas in the proposed sensor are coated with thin film WO3, which mass is sensitive to mentioned gas conc...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριοι συγγραφείς:	Moghavvemi, M., Attaran, A.
Μορφή:	Άρθρο
Έκδοση:	IFSA 2011
Θέματα:	TA Engineering (General). Civil engineering (General)

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