Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes
We report on the transparent conductive oxides (TCO) characteristics based on the indium tin oxides(ITO) and ITO/metal thin layer as an electrode for optoelectronics device applications. ITO, ITO/Ag andITO/Ni were deposited on Si and glass substrate by thermal evaporator and radio frequency (RF) mag...
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| 格式: | 文件 |
| 语言: | English |
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Elsevier
2014
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| 在线阅读: | http://eprints.um.edu.my/9780/1/00011485_103842.pdf |
| _version_ | 1825719764009353216 |
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| author | Ali, A.H. Shuhaimi, A. Hassan, Z. |
| author_facet | Ali, A.H. Shuhaimi, A. Hassan, Z. |
| author_sort | Ali, A.H. |
| collection | UM |
| description | We report on the transparent conductive oxides (TCO) characteristics based on the indium tin oxides(ITO) and ITO/metal thin layer as an electrode for optoelectronics device applications. ITO, ITO/Ag andITO/Ni were deposited on Si and glass substrate by thermal evaporator and radio frequency (RF) mag-netron sputtering at room temperature. Post deposition annealing was performed on the samples in airat moderate temperature of 500◦C and 600◦C. The structural, optical and electrical properties of theITO and ITO/metal were characterized using X-ray diffraction (XRD), UV–Vis spectrophotometer, Halleffect measurement system and atomic force microscope (AFM). The XRD spectrum reveals significantpolycrystalline peaks of ITO (2 2 2) and Ag (1 1 1) after post annealing process. The post annealing alsoimproves the visible light transmittance and electrical resistivity of the samples. Figure of merit (FOM) ofthe ITO, ITO/Ag and ITO/Ni were determined as 5.5 × 10−3�−1, 8.4 × 10−3�−1and 3.0 × 10−5�−1, respec-tively. The results show that the post annealed ITO with Ag intermediate layer improved the efficiencyof the transparent conductive electrodes (TCE) as compared to the ITO and ITO/Ni. |
| first_indexed | 2024-03-06T05:24:44Z |
| format | Article |
| id | um.eprints-9780 |
| institution | Universiti Malaya |
| language | English |
| last_indexed | 2024-03-06T05:24:44Z |
| publishDate | 2014 |
| publisher | Elsevier |
| record_format | dspace |
| spelling | um.eprints-97802014-04-28T01:51:47Z http://eprints.um.edu.my/9780/ Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes Ali, A.H. Shuhaimi, A. Hassan, Z. Q Science (General) QC Physics We report on the transparent conductive oxides (TCO) characteristics based on the indium tin oxides(ITO) and ITO/metal thin layer as an electrode for optoelectronics device applications. ITO, ITO/Ag andITO/Ni were deposited on Si and glass substrate by thermal evaporator and radio frequency (RF) mag-netron sputtering at room temperature. Post deposition annealing was performed on the samples in airat moderate temperature of 500◦C and 600◦C. The structural, optical and electrical properties of theITO and ITO/metal were characterized using X-ray diffraction (XRD), UV–Vis spectrophotometer, Halleffect measurement system and atomic force microscope (AFM). The XRD spectrum reveals significantpolycrystalline peaks of ITO (2 2 2) and Ag (1 1 1) after post annealing process. The post annealing alsoimproves the visible light transmittance and electrical resistivity of the samples. Figure of merit (FOM) ofthe ITO, ITO/Ag and ITO/Ni were determined as 5.5 × 10−3�−1, 8.4 × 10−3�−1and 3.0 × 10−5�−1, respec-tively. The results show that the post annealed ITO with Ag intermediate layer improved the efficiencyof the transparent conductive electrodes (TCE) as compared to the ITO and ITO/Ni. Elsevier 2014 Article PeerReviewed application/pdf en http://eprints.um.edu.my/9780/1/00011485_103842.pdf Ali, A.H. and Shuhaimi, A. and Hassan, Z. (2014) Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes. Applied Surface Science. pp. 599-603. DOI https://doi.org/10.1016/j.apsusc.2013.10.079 <https://doi.org/10.1016/j.apsusc.2013.10.079>. http://dx.doi.org/10.1016/j.apsusc.2013.10.079 |
| spellingShingle | Q Science (General) QC Physics Ali, A.H. Shuhaimi, A. Hassan, Z. Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes |
| title | Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes |
| title_full | Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes |
| title_fullStr | Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes |
| title_full_unstemmed | Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes |
| title_short | Structural,optical and electrical characterization of ITO, ITO/Ag and ITO/Ni transparent conductive electrodes |
| title_sort | structural optical and electrical characterization of ito ito ag and ito ni transparent conductive electrodes |
| topic | Q Science (General) QC Physics |
| url | http://eprints.um.edu.my/9780/1/00011485_103842.pdf |
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