Aluminium interdigitated electrode with 5.0 μm gap for electrolytic scooting
The goal of the research project is to design, fabricate, and characterize an extremely sensitive biosensor for use in healthcare. Using AutoCAD software, a novel IDE pattern with a 5 µm finger gap was created. Conventional photolithography and regular CMOS technology were used in the fabrication pr...
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English English |
| Published: |
Penerbit UniMAP
2023
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| Subjects: | |
| Online Access: | https://eprints.ums.edu.my/id/eprint/41359/1/ABSTRACT.pdf https://eprints.ums.edu.my/id/eprint/41359/2/FULL%20TEXT.pdf |