Fabrication And Characterization Of O.5-Um Mosfet Bulk Silicon Technology On Thick Bonded Silicon-On-Insulator Substrate

Fabrication And Characterization Of O.5-Um Mosfet Bulk Silicon Technology On Thick Bonded Silicon-On-Insulator Substrate

The effect of thick film Silicon-On-Insulator (SOl) substrate on device fabrication and performance is studied. Enhancement-type Partially-Depleted SOl MOS device is fabricated on bonded SOl (BSOI) substrate based on bulk silicon MIMOS 0.5 um CMOS technology with full compatibility maintained. Th...

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Bibliographic Details
Main Author: Abdullah, Wan Fazlida Hanim
Format: Thesis
Language:English
English
Published: 2003
Subjects:
Mosetenos
Silicon
Online Access:http://psasir.upm.edu.my/id/eprint/12153/1/FK_2003_12.pdf

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