Parallel scanning near-field photolithography: the Snomipede
The “Millipede”, developed by Binnig and co-workers (Bining, G. K.; et al. IBM J. Res. Devel. 2000, 44, 323.), elegantly solves the problem of the serial nature of scanning probe lithography processes, by deploying massive parallelism. Here we fuse the “Millipede” concept with scanning near-field ph...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2010
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| Online Access: | http://psasir.upm.edu.my/id/eprint/16036/1/Parallel%20scanning%20near-field%20photolithography%20%20the%20snomipede..pdf |
| _version_ | 1825945737872015360 |
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| author | Ul-Haq, Ehtsham Liu, Zhuming Zhang, Yuan Alang Ahmad, Shahrul Ainliah Wong, Lu Shin Armes, Steven P. Hobbs, Jamie K. Leggett, Graham J. Micklefield, Jason Roberts, Clive J. Weaver, John M. R. |
| author_facet | Ul-Haq, Ehtsham Liu, Zhuming Zhang, Yuan Alang Ahmad, Shahrul Ainliah Wong, Lu Shin Armes, Steven P. Hobbs, Jamie K. Leggett, Graham J. Micklefield, Jason Roberts, Clive J. Weaver, John M. R. |
| author_sort | Ul-Haq, Ehtsham |
| collection | UPM |
| description | The “Millipede”, developed by Binnig and co-workers (Bining, G. K.; et al. IBM J. Res. Devel. 2000, 44, 323.), elegantly solves the problem of the serial nature of scanning probe lithography processes, by deploying massive parallelism. Here we fuse the “Millipede” concept with scanning near-field photolithography to yield a “Snomipede” that is capable of executing parallel chemical transformations at high resolution over macroscopic areas. Our prototype has sixteen probes that are separately controllable using a methodology that is, in principle, scalable to much larger arrays. Light beams generated by a spatial modulator or a zone plate array are coupled to arrays of cantilever probes with hollow, pyramidal tips. We demonstrate selective photodeprotection of nitrophenylpropyloxycarbonyl-protected aminosiloxane monolayers on silicon dioxide and subsequent growth of nanostructured polymer brushes by atom-transfer radical polymerization, and the fabrication of 70 nm structures in photoresist by a Snomipede probe array immersed under water. Such approaches offer a powerful means of integrating the top-down and bottom-up fabrication paradigms, facilitating the reactive processing of materials at nanometer resolution over macroscopic areas. |
| first_indexed | 2024-03-06T07:36:07Z |
| format | Article |
| id | upm.eprints-16036 |
| institution | Universiti Putra Malaysia |
| language | English |
| last_indexed | 2024-03-06T07:36:07Z |
| publishDate | 2010 |
| publisher | American Chemical Society |
| record_format | dspace |
| spelling | upm.eprints-160362016-08-24T02:07:30Z http://psasir.upm.edu.my/id/eprint/16036/ Parallel scanning near-field photolithography: the Snomipede Ul-Haq, Ehtsham Liu, Zhuming Zhang, Yuan Alang Ahmad, Shahrul Ainliah Wong, Lu Shin Armes, Steven P. Hobbs, Jamie K. Leggett, Graham J. Micklefield, Jason Roberts, Clive J. Weaver, John M. R. The “Millipede”, developed by Binnig and co-workers (Bining, G. K.; et al. IBM J. Res. Devel. 2000, 44, 323.), elegantly solves the problem of the serial nature of scanning probe lithography processes, by deploying massive parallelism. Here we fuse the “Millipede” concept with scanning near-field photolithography to yield a “Snomipede” that is capable of executing parallel chemical transformations at high resolution over macroscopic areas. Our prototype has sixteen probes that are separately controllable using a methodology that is, in principle, scalable to much larger arrays. Light beams generated by a spatial modulator or a zone plate array are coupled to arrays of cantilever probes with hollow, pyramidal tips. We demonstrate selective photodeprotection of nitrophenylpropyloxycarbonyl-protected aminosiloxane monolayers on silicon dioxide and subsequent growth of nanostructured polymer brushes by atom-transfer radical polymerization, and the fabrication of 70 nm structures in photoresist by a Snomipede probe array immersed under water. Such approaches offer a powerful means of integrating the top-down and bottom-up fabrication paradigms, facilitating the reactive processing of materials at nanometer resolution over macroscopic areas. American Chemical Society 2010 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/16036/1/Parallel%20scanning%20near-field%20photolithography%20%20the%20snomipede..pdf Ul-Haq, Ehtsham and Liu, Zhuming and Zhang, Yuan and Alang Ahmad, Shahrul Ainliah and Wong, Lu Shin and Armes, Steven P. and Hobbs, Jamie K. and Leggett, Graham J. and Micklefield, Jason and Roberts, Clive J. and Weaver, John M. R. (2010) Parallel scanning near-field photolithography: the Snomipede. Nano Letters, 10 (11). pp. 4375-4380. ISSN 1530-6984; ESSN: 1530-6992 http://pubs.acs.org/doi/abs/10.1021/nl1018782 10.1021/nl1018782 |
| spellingShingle | Ul-Haq, Ehtsham Liu, Zhuming Zhang, Yuan Alang Ahmad, Shahrul Ainliah Wong, Lu Shin Armes, Steven P. Hobbs, Jamie K. Leggett, Graham J. Micklefield, Jason Roberts, Clive J. Weaver, John M. R. Parallel scanning near-field photolithography: the Snomipede |
| title | Parallel scanning near-field photolithography: the Snomipede |
| title_full | Parallel scanning near-field photolithography: the Snomipede |
| title_fullStr | Parallel scanning near-field photolithography: the Snomipede |
| title_full_unstemmed | Parallel scanning near-field photolithography: the Snomipede |
| title_short | Parallel scanning near-field photolithography: the Snomipede |
| title_sort | parallel scanning near field photolithography the snomipede |
| url | http://psasir.upm.edu.my/id/eprint/16036/1/Parallel%20scanning%20near-field%20photolithography%20%20the%20snomipede..pdf |
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