Theoretical formulation to evaluate capacitance for before and after touch point MEMS capacitive pressure sensors
Micro-electromechanical systems (MEMS) have received a great deal of attention in recent years. This is due to the great promise of increased miniaturization and Performance of MEMS devices over conventional devices. MEMS pressure sensors currently dominate the market for greater than atmospheric pr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | http://psasir.upm.edu.my/id/eprint/28743/1/Theoretical%20formulation%20to%20evaluate%20capacitance%20for%20before%20and%20after%20touch%20point%20MEMS%20capacitive%20pressure%20sensors.pdf |