Plasma polymerization. IV. A systematic investigation of the inductively coupled RF plasma polymerization of pentafluorobenzene
The composition and gross structural features of plasma polymer films prepared by inductively coupled RF plasmas excited in pentafluorobenzene were investigated by ESCA as a function of the operating parameters. The rate of film deposition is dependent on the W/FM parameter and on site of deposition...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
John Wiley & Sons, Inc.
1981
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| Online Access: | http://psasir.upm.edu.my/id/eprint/33912/1/33912%20PLASMA%20POLYMERIZATION%20IV..pdf |
| Summary: | The composition and gross structural features of plasma polymer films prepared by inductively coupled RF plasmas excited in pentafluorobenzene were investigated by ESCA as a function of the operating parameters. The rate of film deposition is dependent on the W/FM parameter and on site of deposition. The polymer formed in the glow region shows only small variations in structure as a function of power and pressure. Polymer films deposited in the regions away from the site of primary excitation typically have a higher fluorine content than those formed in the coil region; the stoichiometry for the latter is comparable to that of the starting material. |
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