Plasma polymerization. IV. A systematic investigation of the inductively coupled RF plasma polymerization of pentafluorobenzene
The composition and gross structural features of plasma polymer films prepared by inductively coupled RF plasmas excited in pentafluorobenzene were investigated by ESCA as a function of the operating parameters. The rate of film deposition is dependent on the W/FM parameter and on site of deposition...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
John Wiley & Sons, Inc.
1981
|
| Online Access: | http://psasir.upm.edu.my/id/eprint/33912/1/33912%20PLASMA%20POLYMERIZATION%20IV..pdf |