Penentuan Struktur Permukaan dengan Menggunakan Kaedah Kapasitans

This work describes a method to obtain surface microtopography of a material by scanning its capacitance. Capacitance was measured by the three terminal method with the core of a coaxial cable used as the measuring probe while the shielding wire acted as the guard electrode to eliminate the fringin...

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Detalhes bibliográficos
Principais autores: Wan Yusof, Wan Mohamad Daud, Talib, Zainal Abidin, Ismail, Mohd Zaid
Formato: Artigo
Idioma:English
Malay
Publicado em: Universiti Putra Malaysia Press 1999
Acesso em linha:http://psasir.upm.edu.my/id/eprint/3490/1/Penentuan_Struktur_Permukaan_dengan_Menggunakan.pdf
Descrição
Resumo:This work describes a method to obtain surface microtopography of a material by scanning its capacitance. Capacitance was measured by the three terminal method with the core of a coaxial cable used as the measuring probe while the shielding wire acted as the guard electrode to eliminate the fringing field effect. From our results, we found that good image resolution is best obtained if the medium used has a high dielectric constant than the sample.