Ellipsometric study of Si1-x Gex alloy
A report on ellipsometric studies of Si0.5 Ge0.5 and Si0.7 Ge0.3 thin films is described. The samples were earlier prepared from SiGe disks of 3” diameter using RF magnetron sputtering and the films were deposited onto glass substrates at room temperature. Some of the optical properties were invest...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Malaysian Solid State Science and Technology Society
2003
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| Online Access: | http://psasir.upm.edu.my/id/eprint/42200/1/Ellipsometric%20study%20of%20Si1-x%20Gex%20alloy.pdf |