Micromachined W-band integrated rectangular waveguide filter utilising SU-8
This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A...
| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2007
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| Online Access: | http://psasir.upm.edu.my/id/eprint/47684/1/Micromachined%20W-band%20integrated%20rectangular%20waveguide%20filter%20utilising%20SU-8.pdf |
| _version_ | 1796974835634536448 |
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| author | Ismail, Alyani Razalli, Mohammad Shahrazel Mahdi, Mohd Adzir Wan Darman, Wan Nurul Izza Raja Abdullah, Raja Syamsul Azmir Mohd Isa, Maryam |
| author_facet | Ismail, Alyani Razalli, Mohammad Shahrazel Mahdi, Mohd Adzir Wan Darman, Wan Nurul Izza Raja Abdullah, Raja Syamsul Azmir Mohd Isa, Maryam |
| author_sort | Ismail, Alyani |
| collection | UPM |
| description | This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A W-band micromachined rectangular waveguide filter utilizing SU-8 micromachining with CPW input and output ports has been designed. Simulated frequency responses exhibit insertion loss of 1.18 dB across 1 GHz bandwidth for W-band frequency range centered at 93 GHz with return loss better than -20 dB. |
| first_indexed | 2024-03-06T09:02:48Z |
| format | Conference or Workshop Item |
| id | upm.eprints-47684 |
| institution | Universiti Putra Malaysia |
| language | English |
| last_indexed | 2024-03-06T09:02:48Z |
| publishDate | 2007 |
| publisher | IEEE |
| record_format | dspace |
| spelling | upm.eprints-476842016-07-14T04:40:20Z http://psasir.upm.edu.my/id/eprint/47684/ Micromachined W-band integrated rectangular waveguide filter utilising SU-8 Ismail, Alyani Razalli, Mohammad Shahrazel Mahdi, Mohd Adzir Wan Darman, Wan Nurul Izza Raja Abdullah, Raja Syamsul Azmir Mohd Isa, Maryam This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A W-band micromachined rectangular waveguide filter utilizing SU-8 micromachining with CPW input and output ports has been designed. Simulated frequency responses exhibit insertion loss of 1.18 dB across 1 GHz bandwidth for W-band frequency range centered at 93 GHz with return loss better than -20 dB. IEEE 2007 Conference or Workshop Item PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/47684/1/Micromachined%20W-band%20integrated%20rectangular%20waveguide%20filter%20utilising%20SU-8.pdf Ismail, Alyani and Razalli, Mohammad Shahrazel and Mahdi, Mohd Adzir and Wan Darman, Wan Nurul Izza and Raja Abdullah, Raja Syamsul Azmir and Mohd Isa, Maryam (2007) Micromachined W-band integrated rectangular waveguide filter utilising SU-8. In: Asia-Pacific Microwave Conference (APMC 2007), 11-14 Dec. 2007, Bangkok, Thailand. . 10.1109/APMC.2007.4554831 |
| spellingShingle | Ismail, Alyani Razalli, Mohammad Shahrazel Mahdi, Mohd Adzir Wan Darman, Wan Nurul Izza Raja Abdullah, Raja Syamsul Azmir Mohd Isa, Maryam Micromachined W-band integrated rectangular waveguide filter utilising SU-8 |
| title | Micromachined W-band integrated rectangular waveguide filter utilising SU-8 |
| title_full | Micromachined W-band integrated rectangular waveguide filter utilising SU-8 |
| title_fullStr | Micromachined W-band integrated rectangular waveguide filter utilising SU-8 |
| title_full_unstemmed | Micromachined W-band integrated rectangular waveguide filter utilising SU-8 |
| title_short | Micromachined W-band integrated rectangular waveguide filter utilising SU-8 |
| title_sort | micromachined w band integrated rectangular waveguide filter utilising su 8 |
| url | http://psasir.upm.edu.my/id/eprint/47684/1/Micromachined%20W-band%20integrated%20rectangular%20waveguide%20filter%20utilising%20SU-8.pdf |
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