Plasma polymerization of silicon-containing monomers

Plasma depositions of ultra thin films from seven silicon-containing liquid monomers were investigated using a continuos wave (CW) plasma source. The deposition rate of plasma polymerized films were determined using a quartz crystal microbalance (QCM) technique while the film composition were determ...

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Main Authors: Talib, Zainal Abidin, Kurosawa, Shigeru, Atthoff, Bjorn, Aizawa, Hidenobu, Kashima, Kazuya, Hirokawa, Tomoya, Yoshimi, Yasuo, Yoshimoto, Minoru, Hirotsu, Toshihiro, Miyake, Jun, Hilborn, Jons
Format: Article
Language:English
English
Published: The Society of Photopolymer Science and Technology 2001
Online Access:http://psasir.upm.edu.my/id/eprint/48661/1/Plasma%20polymerization%20of%20silicon-containing%20monomers.pdf
http://psasir.upm.edu.my/id/eprint/48661/7/14_129.pdf
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author Talib, Zainal Abidin
Kurosawa, Shigeru
Atthoff, Bjorn
Aizawa, Hidenobu
Kashima, Kazuya
Hirokawa, Tomoya
Yoshimi, Yasuo
Yoshimoto, Minoru
Hirotsu, Toshihiro
Miyake, Jun
Hilborn, Jons
author_facet Talib, Zainal Abidin
Kurosawa, Shigeru
Atthoff, Bjorn
Aizawa, Hidenobu
Kashima, Kazuya
Hirokawa, Tomoya
Yoshimi, Yasuo
Yoshimoto, Minoru
Hirotsu, Toshihiro
Miyake, Jun
Hilborn, Jons
author_sort Talib, Zainal Abidin
collection UPM
description Plasma depositions of ultra thin films from seven silicon-containing liquid monomers were investigated using a continuos wave (CW) plasma source. The deposition rate of plasma polymerized films were determined using a quartz crystal microbalance (QCM) technique while the film composition were determined spectroscopiclly using primarily X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared method (FT-IR). The wettability of the plasma-polymerized films was also investigated by measuring the contact angles of water on the film surfaces. It was observed that the C=C absorption band was not present in these films. This observation is consistent with selective polymerization through the double bond. Oxygen was present in all samples investigated and this may be attributed to the quenching of radicals in the film by reactions with oxygen when exposed to atmosphere.
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spelling upm.eprints-486612024-08-08T04:56:09Z http://psasir.upm.edu.my/id/eprint/48661/ Plasma polymerization of silicon-containing monomers Talib, Zainal Abidin Kurosawa, Shigeru Atthoff, Bjorn Aizawa, Hidenobu Kashima, Kazuya Hirokawa, Tomoya Yoshimi, Yasuo Yoshimoto, Minoru Hirotsu, Toshihiro Miyake, Jun Hilborn, Jons Plasma depositions of ultra thin films from seven silicon-containing liquid monomers were investigated using a continuos wave (CW) plasma source. The deposition rate of plasma polymerized films were determined using a quartz crystal microbalance (QCM) technique while the film composition were determined spectroscopiclly using primarily X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared method (FT-IR). The wettability of the plasma-polymerized films was also investigated by measuring the contact angles of water on the film surfaces. It was observed that the C=C absorption band was not present in these films. This observation is consistent with selective polymerization through the double bond. Oxygen was present in all samples investigated and this may be attributed to the quenching of radicals in the film by reactions with oxygen when exposed to atmosphere. The Society of Photopolymer Science and Technology 2001 Article PeerReviewed text en http://psasir.upm.edu.my/id/eprint/48661/1/Plasma%20polymerization%20of%20silicon-containing%20monomers.pdf text en http://psasir.upm.edu.my/id/eprint/48661/7/14_129.pdf Talib, Zainal Abidin and Kurosawa, Shigeru and Atthoff, Bjorn and Aizawa, Hidenobu and Kashima, Kazuya and Hirokawa, Tomoya and Yoshimi, Yasuo and Yoshimoto, Minoru and Hirotsu, Toshihiro and Miyake, Jun and Hilborn, Jons (2001) Plasma polymerization of silicon-containing monomers. Journal of Photopolymer Science and Technology, 14 (1). pp. 129-138. ISSN 0914-9244; ESSN: 1349-6336 https://www.jstage.jst.go.jp/article/photopolymer1988/14/1/14_1_129/_article 10.2494/photopolymer.14.129
spellingShingle Talib, Zainal Abidin
Kurosawa, Shigeru
Atthoff, Bjorn
Aizawa, Hidenobu
Kashima, Kazuya
Hirokawa, Tomoya
Yoshimi, Yasuo
Yoshimoto, Minoru
Hirotsu, Toshihiro
Miyake, Jun
Hilborn, Jons
Plasma polymerization of silicon-containing monomers
title Plasma polymerization of silicon-containing monomers
title_full Plasma polymerization of silicon-containing monomers
title_fullStr Plasma polymerization of silicon-containing monomers
title_full_unstemmed Plasma polymerization of silicon-containing monomers
title_short Plasma polymerization of silicon-containing monomers
title_sort plasma polymerization of silicon containing monomers
url http://psasir.upm.edu.my/id/eprint/48661/1/Plasma%20polymerization%20of%20silicon-containing%20monomers.pdf
http://psasir.upm.edu.my/id/eprint/48661/7/14_129.pdf
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