Plasma polymerization of silicon-containing monomers
Plasma depositions of ultra thin films from seven silicon-containing liquid monomers were investigated using a continuos wave (CW) plasma source. The deposition rate of plasma polymerized films were determined using a quartz crystal microbalance (QCM) technique while the film composition were determ...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English English |
| Published: |
The Society of Photopolymer Science and Technology
2001
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| Online Access: | http://psasir.upm.edu.my/id/eprint/48661/1/Plasma%20polymerization%20of%20silicon-containing%20monomers.pdf http://psasir.upm.edu.my/id/eprint/48661/7/14_129.pdf |