Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography
The realization of reliable nanobiosensor devices requires the improvement of fabrication techniques to form the nanometer-sized structures and patterns, which were used to attach nano materials such as DNA for the device elements. This study demonstrates the sensitivity of silicon nanowires (SiNWs)...
| Main Authors: | , , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2014
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| Online Access: | http://psasir.upm.edu.my/id/eprint/55666/1/Top-down%20fabrication%20of%20silicon%20nanowire%20sensor%20using%20electron%20beam%20and%20optical%20mixed%20lithography.pdf |