Development of nanocrystalline laser ablated thick film array gas sensor
A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectivel...
| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2010
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| Online Access: | http://psasir.upm.edu.my/id/eprint/68162/1/Development%20of%20nanocrystalline%20laser%20ablated%20thick%20film%20array%20gas%20sensor.pdf |
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| author | Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman Misron, Norhisam |
| author_facet | Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman Misron, Norhisam |
| author_sort | Abadi, Mohammad Hadi Nezhad Shahrokh |
| collection | UPM |
| description | A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer. |
| first_indexed | 2024-03-06T09:57:48Z |
| format | Conference or Workshop Item |
| id | upm.eprints-68162 |
| institution | Universiti Putra Malaysia |
| language | English |
| last_indexed | 2024-03-06T09:57:48Z |
| publishDate | 2010 |
| publisher | IEEE |
| record_format | dspace |
| spelling | upm.eprints-681622019-05-09T01:44:54Z http://psasir.upm.edu.my/id/eprint/68162/ Development of nanocrystalline laser ablated thick film array gas sensor Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman Misron, Norhisam A multi-layer thick film array sensor for gas sensing application including heater element, insulator layer, and interdigitated electrodes was designed and fabricated on alumina substrate. Tin dioxide and platinum nanopowder were used in the pellet form as the active and catalyst layers, respectively. Pulse laser ablation deposition (PLAD) technique was used to deposit the sensitive layer onto the electrode part of each sensor. Microstructural and morphological properties of the sensor surface were determined. Sensors were exposed to wood smoke and their sensitivity were measured and compared with the results of the sensors without catalyst layer. IEEE 2010 Conference or Workshop Item PeerReviewed text en http://psasir.upm.edu.my/id/eprint/68162/1/Development%20of%20nanocrystalline%20laser%20ablated%20thick%20film%20array%20gas%20sensor.pdf Abadi, Mohammad Hadi Nezhad Shahrokh and Hamidon, Mohd Nizar and Shaari, Abdul Halim and Abdullah, Norhafizah and Wagiran, Rahman and Misron, Norhisam (2010) Development of nanocrystalline laser ablated thick film array gas sensor. In: 2010 IEEE International Conference on Semiconductor Electronics (ICSE 2010), 28-30 June 2010, Melaka, Malaysia. (pp. 88-91). 10.1109/SMELEC.2010.5549421 |
| spellingShingle | Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman Misron, Norhisam Development of nanocrystalline laser ablated thick film array gas sensor |
| title | Development of nanocrystalline laser ablated thick film array gas sensor |
| title_full | Development of nanocrystalline laser ablated thick film array gas sensor |
| title_fullStr | Development of nanocrystalline laser ablated thick film array gas sensor |
| title_full_unstemmed | Development of nanocrystalline laser ablated thick film array gas sensor |
| title_short | Development of nanocrystalline laser ablated thick film array gas sensor |
| title_sort | development of nanocrystalline laser ablated thick film array gas sensor |
| url | http://psasir.upm.edu.my/id/eprint/68162/1/Development%20of%20nanocrystalline%20laser%20ablated%20thick%20film%20array%20gas%20sensor.pdf |
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