Nonlinear modeling of a capacitive MEMS accelerometer using neural network
This paper presents a nonlinear model for a capacitive Microelectromechanical accelerometer (MEMA). System parameters of the accelerometer are developed using the effect of cubic term of the folded-flexure spring. To solving this equation we use FEA method. The neural network (NN) uses Levenberg-Mar...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2008
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| Online Access: | http://psasir.upm.edu.my/id/eprint/69349/1/Nonlinear%20modeling%20of%20a%20capacitive%20MEMS%20accelerometer%20using%20neural%20network.pdf |