Capacitive pressure sensors based on MEMS, operating in harsh environments
Poly-crystalline silicon carbide (polysic) Micro-electromechanical systems (MEMS) capacitive pressure sensors operating at harsh environments (e.g. high temperature) are proposed because of SiC owing excellent electrical stability, mechanical robustness, and chemical inertness properties. The princi...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2008
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| Online Access: | http://psasir.upm.edu.my/id/eprint/69674/1/Capacitive%20pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments.pdf |