Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization
Dalam kajian ini, struktur get HEMT dengan gatelength bersaiz 200 nm dan berprofil cendawan telah direkabentuk, difabrikasi dan dicirikan. In this research study, 200 nm gatelength HEMT gate structures with mushroom-shaped profile have been designed, fabricated and characterized.
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| Format: | Thesis |
| Language: | English |
| Published: |
2008
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| Online Access: | http://eprints.usm.my/10407/1/FABRICATION_OF_SUBMICRON_HEMT_MUSHROOM_GATE.pdf |
| _version_ | 1797004533972336640 |
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| author | Yusof, Ashaari |
| author_facet | Yusof, Ashaari |
| author_sort | Yusof, Ashaari |
| collection | USM |
| description | Dalam kajian ini, struktur get HEMT dengan gatelength bersaiz 200 nm dan berprofil cendawan telah direkabentuk, difabrikasi dan dicirikan.
In this research study, 200 nm gatelength HEMT gate structures with mushroom-shaped profile have been designed, fabricated and characterized.
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| first_indexed | 2024-03-06T13:57:32Z |
| format | Thesis |
| id | usm.eprints-10407 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2024-03-06T13:57:32Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | usm.eprints-104072020-01-31T07:32:09Z http://eprints.usm.my/10407/ Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization Yusof, Ashaari TK7800-8360 Electronics Dalam kajian ini, struktur get HEMT dengan gatelength bersaiz 200 nm dan berprofil cendawan telah direkabentuk, difabrikasi dan dicirikan. In this research study, 200 nm gatelength HEMT gate structures with mushroom-shaped profile have been designed, fabricated and characterized. 2008-12 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/10407/1/FABRICATION_OF_SUBMICRON_HEMT_MUSHROOM_GATE.pdf Yusof, Ashaari (2008) Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization. Masters thesis, Universiti Sains Malaysia. |
| spellingShingle | TK7800-8360 Electronics Yusof, Ashaari Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization |
| title | Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization |
| title_full | Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization |
| title_fullStr | Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization |
| title_full_unstemmed | Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization |
| title_short | Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization |
| title_sort | fabrication of submicron hemt mushroom gate structure using electron beam lithography and its characterization |
| topic | TK7800-8360 Electronics |
| url | http://eprints.usm.my/10407/1/FABRICATION_OF_SUBMICRON_HEMT_MUSHROOM_GATE.pdf |
| work_keys_str_mv | AT yusofashaari fabricationofsubmicronhemtmushroomgatestructureusingelectronbeamlithographyanditscharacterization |