Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique
Metal-organic decomposed (MOD) Ce(h precursor has been spin coated on n-type Si and n-type GaN substrates with thickness in the range of 45-90 nm. Prapenanda Ce02 yang disediakan dengan teknik penguraian organik logam telah diserakkan ke atas wafer Si dan GaN beljenis n dengan ketebalan dalam Iin...
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| Format: | Thesis |
| Language: | English |
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2010
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| Online Access: | http://eprints.usm.my/28916/1/INVESTIGATION_OF_METAL_ORGANIC_DECOMPOSED_MOD_CERIUM_OXIDE.pdf |
| _version_ | 1825832129917878272 |
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| author | Quah, Hock Jin |
| author_facet | Quah, Hock Jin |
| author_sort | Quah, Hock Jin |
| collection | USM |
| description | Metal-organic decomposed (MOD) Ce(h precursor has been spin coated on
n-type Si and n-type GaN substrates with thickness in the range of 45-90 nm. Prapenanda Ce02 yang disediakan dengan teknik penguraian organik logam
telah diserakkan ke atas wafer Si dan GaN beljenis n dengan ketebalan dalam
Iinkungan 45-90 run. |
| first_indexed | 2024-03-06T14:48:14Z |
| format | Thesis |
| id | usm.eprints-28916 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2024-03-06T14:48:14Z |
| publishDate | 2010 |
| record_format | dspace |
| spelling | usm.eprints-289162017-05-15T08:05:02Z http://eprints.usm.my/28916/ Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique Quah, Hock Jin TN1-997 Mining engineering. Metallurgy Metal-organic decomposed (MOD) Ce(h precursor has been spin coated on n-type Si and n-type GaN substrates with thickness in the range of 45-90 nm. Prapenanda Ce02 yang disediakan dengan teknik penguraian organik logam telah diserakkan ke atas wafer Si dan GaN beljenis n dengan ketebalan dalam Iinkungan 45-90 run. 2010 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/28916/1/INVESTIGATION_OF_METAL_ORGANIC_DECOMPOSED_MOD_CERIUM_OXIDE.pdf Quah, Hock Jin (2010) Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique. Masters thesis, Universiti Sains Malaysia. |
| spellingShingle | TN1-997 Mining engineering. Metallurgy Quah, Hock Jin Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
| title | Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
| title_full | Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
| title_fullStr | Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
| title_full_unstemmed | Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
| title_short | Investigation Of Metal-Organic Decomposed (MOD) Cerium Oxide (Ceo2) Gate Deposited On Silicon And Gallium Nitride Substrates Via Spin-On Coating Technique |
| title_sort | investigation of metal organic decomposed mod cerium oxide ceo2 gate deposited on silicon and gallium nitride substrates via spin on coating technique |
| topic | TN1-997 Mining engineering. Metallurgy |
| url | http://eprints.usm.my/28916/1/INVESTIGATION_OF_METAL_ORGANIC_DECOMPOSED_MOD_CERIUM_OXIDE.pdf |
| work_keys_str_mv | AT quahhockjin investigationofmetalorganicdecomposedmodceriumoxideceo2gatedepositedonsiliconandgalliumnitridesubstratesviaspinoncoatingtechnique |