Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film
Thin film based gas sensor is an advanced application of thin film especially Ga2O3 (GO) thin film gas sensor is useful for high temperature gas sensor. The effect of moisture or environment on thin film properties has more influence on gas sensing properties. Radio Frequency sputtered Ga2O3 thin fi...
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| Format: | Article |
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Springer Verlag (Germany)
2016
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| _version_ | 1825833619931791360 |
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| author | Subramani, Shanmugan Devarajan, Mutharasu |
| author_facet | Subramani, Shanmugan Devarajan, Mutharasu |
| author_sort | Subramani, Shanmugan |
| collection | USM |
| description | Thin film based gas sensor is an advanced application of thin film especially Ga2O3 (GO) thin film gas sensor is useful for high temperature gas sensor. The effect of moisture or environment on thin film properties has more influence on gas sensing properties. Radio Frequency sputtered Ga2O3 thin film was synthesized and processed in ultra-high pure hot water at 95 |
| first_indexed | 2024-03-06T15:10:33Z |
| format | Article |
| id | usm.eprints-37231 |
| institution | Universiti Sains Malaysia |
| last_indexed | 2024-03-06T15:10:33Z |
| publishDate | 2016 |
| publisher | Springer Verlag (Germany) |
| record_format | dspace |
| spelling | usm.eprints-372312017-10-26T00:51:28Z http://eprints.usm.my/37231/ Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film Subramani, Shanmugan Devarajan, Mutharasu QC1-999 Physics Thin film based gas sensor is an advanced application of thin film especially Ga2O3 (GO) thin film gas sensor is useful for high temperature gas sensor. The effect of moisture or environment on thin film properties has more influence on gas sensing properties. Radio Frequency sputtered Ga2O3 thin film was synthesized and processed in ultra-high pure hot water at 95 Springer Verlag (Germany) 2016 Article PeerReviewed Subramani, Shanmugan and Devarajan, Mutharasu (2016) Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film. Materials Science, 22 (2). pp. 166-169. ISSN 1068-820X http://matsc.ktu.lt/index.php/MatSc/article/view/7186/7726 |
| spellingShingle | QC1-999 Physics Subramani, Shanmugan Devarajan, Mutharasu Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film |
| title | Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film |
| title_full | Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film |
| title_fullStr | Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film |
| title_full_unstemmed | Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film |
| title_short | Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film |
| title_sort | structural and optical properties of ultra high pure hot water processed ga2o3 thin film |
| topic | QC1-999 Physics |
| work_keys_str_mv | AT subramanishanmugan structuralandopticalpropertiesofultrahighpurehotwaterprocessedga2o3thinfilm AT devarajanmutharasu structuralandopticalpropertiesofultrahighpurehotwaterprocessedga2o3thinfilm |