Development Of 3D Microstructures By Using Grayscale Photolithographic Technique
Perkembangan pesat teknologi seperti bio-chip, peranti pendalir mikro, peranti mikro-optik dan sistem mikro elektro-mekanikal (MEMS) memerlukan keupayaan membina struktur tiga dimensi (3D) yang kompleks di skala mikro. Bagi membina struktur 3D di skala mikro, kebiasaannya beberapa topeng cahaya digu...
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| Format: | Thesis |
| Language: | English |
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2016
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| Online Access: | http://eprints.usm.my/41609/1/Development_Of_3D_Microstructures_By_Using_Grayscale_Photolithographic_Technique.pdf |