Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors
In this thesis, experimental fabrication and theoretical simulation of Ge islands Si based metal-semiconductor-metal photodetectors have been reported. Radio frequency sputtering was used to deposit Ge thin films on silicon substrates. This is followed by rapid thermal annealing to form Ge islands....
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| Format: | Thesis |
| Language: | English |
| Published: |
2010
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| Online Access: | http://eprints.usm.my/41822/1/HADI_MAHMODI_SHEIKH_SARMAST.pdf |