Determination of argon fluoride (ArF) excimer laser system and materials diagnosis
The growing interest in precise fabrication of micro and nano-structures such as optical component, lenses, sensor and devices makes the conventional approach no longer satisfactory for micro scale structure. Now, nano-technology has a big potential to revolutionize everything from medicine, indust...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Book Section |
| Language: | English |
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Penerbit Universiti Sains Malaysia
2004
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| Online Access: | http://eprints.usm.my/41886/1/pAMN06.pdf |
| _version_ | 1825834513963417600 |
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| author | Salleh, Mohd Hazimin Mohd Bidin, Noriah |
| author2 | Ahmad, Abdul Latif |
| author_facet | Ahmad, Abdul Latif Salleh, Mohd Hazimin Mohd Bidin, Noriah |
| author_sort | Salleh, Mohd Hazimin Mohd |
| collection | USM |
| description | The growing interest in precise fabrication of micro and nano-structures such as optical component, lenses, sensor and devices makes the conventional approach no longer
satisfactory for micro scale structure. Now, nano-technology has a big potential to revolutionize everything from medicine, industrial manufacturing and to computer
within a few decades. |
| first_indexed | 2024-03-06T15:23:53Z |
| format | Book Section |
| id | usm.eprints-41886 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2024-03-06T15:23:53Z |
| publishDate | 2004 |
| publisher | Penerbit Universiti Sains Malaysia |
| record_format | dspace |
| spelling | usm.eprints-418862018-11-19T04:00:30Z http://eprints.usm.my/41886/ Determination of argon fluoride (ArF) excimer laser system and materials diagnosis Salleh, Mohd Hazimin Mohd Bidin, Noriah Q179.9-180 Research The growing interest in precise fabrication of micro and nano-structures such as optical component, lenses, sensor and devices makes the conventional approach no longer satisfactory for micro scale structure. Now, nano-technology has a big potential to revolutionize everything from medicine, industrial manufacturing and to computer within a few decades. Penerbit Universiti Sains Malaysia Ahmad, Abdul Latif Yahya, Ahmad Ramli Mohd Abdullah, Amirul AI-Ashraf Muhammad, Tengku Sifzizul Tengku 2004 Book Section PeerReviewed application/pdf en http://eprints.usm.my/41886/1/pAMN06.pdf Salleh, Mohd Hazimin Mohd and Bidin, Noriah (2004) Determination of argon fluoride (ArF) excimer laser system and materials diagnosis. In: The 4th Annual Seminar of National Science Fellowship NSF 2004 Proceedings. Penerbit Universiti Sains Malaysia, Pulau Pinang, Malaysia, pp. 328-330. |
| spellingShingle | Q179.9-180 Research Salleh, Mohd Hazimin Mohd Bidin, Noriah Determination of argon fluoride (ArF) excimer laser system and materials diagnosis |
| title | Determination of argon fluoride (ArF) excimer laser system and materials diagnosis |
| title_full | Determination of argon fluoride (ArF) excimer laser system and materials diagnosis |
| title_fullStr | Determination of argon fluoride (ArF) excimer laser system and materials diagnosis |
| title_full_unstemmed | Determination of argon fluoride (ArF) excimer laser system and materials diagnosis |
| title_short | Determination of argon fluoride (ArF) excimer laser system and materials diagnosis |
| title_sort | determination of argon fluoride arf excimer laser system and materials diagnosis |
| topic | Q179.9-180 Research |
| url | http://eprints.usm.my/41886/1/pAMN06.pdf |
| work_keys_str_mv | AT sallehmohdhaziminmohd determinationofargonfluoridearfexcimerlasersystemandmaterialsdiagnosis AT bidinnoriah determinationofargonfluoridearfexcimerlasersystemandmaterialsdiagnosis |