Determination of argon fluoride (ArF) excimer laser system and materials diagnosis
The growing interest in precise fabrication of micro and nano-structures such as optical component, lenses, sensor and devices makes the conventional approach no longer satisfactory for micro scale structure. Now, nano-technology has a big potential to revolutionize everything from medicine, indust...
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| Format: | Book Section |
| Language: | English |
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Penerbit Universiti Sains Malaysia
2004
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| Online Access: | http://eprints.usm.my/41886/1/pAMN06.pdf |