Fabrication And Physical Characterisation Of Zinc Oxide Thin Films

Zinc oxide (ZnO) thin films were deposited on α-0001 sapphire substrates using direct current (d.c.) magnetron sputtering process and annealed at various temperatures in an inert atmosphere to investigate its effect on the ultraviolet (UV) emission, stress, lattice constants, crystallite size as wel...

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Main Author: Lim , Yam Tee
Format: Thesis
Language:English
Published: 2012
Subjects:
Online Access:http://eprints.usm.my/41953/1/LIM_YAM_TEE.pdf
_version_ 1825834527404064768
author Lim , Yam Tee
author_facet Lim , Yam Tee
author_sort Lim , Yam Tee
collection USM
description Zinc oxide (ZnO) thin films were deposited on α-0001 sapphire substrates using direct current (d.c.) magnetron sputtering process and annealed at various temperatures in an inert atmosphere to investigate its effect on the ultraviolet (UV) emission, stress, lattice constants, crystallite size as well as the possibility of inducing nanostructure growth. Scanning electron microscope (SEM) and X-ray diffraction (XRD) found that ZnO thin films have a fairly uniform granular surface structure with a preferential c-axis growth direction.
first_indexed 2024-03-06T15:24:05Z
format Thesis
id usm.eprints-41953
institution Universiti Sains Malaysia
language English
last_indexed 2024-03-06T15:24:05Z
publishDate 2012
record_format dspace
spelling usm.eprints-419532019-04-12T05:26:23Z http://eprints.usm.my/41953/ Fabrication And Physical Characterisation Of Zinc Oxide Thin Films Lim , Yam Tee LC5800-5808 Distance education. Zinc oxide (ZnO) thin films were deposited on α-0001 sapphire substrates using direct current (d.c.) magnetron sputtering process and annealed at various temperatures in an inert atmosphere to investigate its effect on the ultraviolet (UV) emission, stress, lattice constants, crystallite size as well as the possibility of inducing nanostructure growth. Scanning electron microscope (SEM) and X-ray diffraction (XRD) found that ZnO thin films have a fairly uniform granular surface structure with a preferential c-axis growth direction. 2012-03 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/41953/1/LIM_YAM_TEE.pdf Lim , Yam Tee (2012) Fabrication And Physical Characterisation Of Zinc Oxide Thin Films. Masters thesis, Universiti Sains Malaysia.
spellingShingle LC5800-5808 Distance education.
Lim , Yam Tee
Fabrication And Physical Characterisation Of Zinc Oxide Thin Films
title Fabrication And Physical Characterisation Of Zinc Oxide Thin Films
title_full Fabrication And Physical Characterisation Of Zinc Oxide Thin Films
title_fullStr Fabrication And Physical Characterisation Of Zinc Oxide Thin Films
title_full_unstemmed Fabrication And Physical Characterisation Of Zinc Oxide Thin Films
title_short Fabrication And Physical Characterisation Of Zinc Oxide Thin Films
title_sort fabrication and physical characterisation of zinc oxide thin films
topic LC5800-5808 Distance education.
url http://eprints.usm.my/41953/1/LIM_YAM_TEE.pdf
work_keys_str_mv AT limyamtee fabricationandphysicalcharacterisationofzincoxidethinfilms