A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films posse...
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| Format: | Thesis |
| Language: | English |
| Published: |
2011
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| Online Access: | http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf |
| _version_ | 1797010767773433856 |
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| author | al-Hardan, Naif Hammad Misshin |
| author_facet | al-Hardan, Naif Hammad Misshin |
| author_sort | al-Hardan, Naif Hammad Misshin |
| collection | USM |
| description | Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films possessed a polycrystalline structure with a (002) dominant phase grown along the c-axis of the hexagonal structure of the ZnO. The (002) peak was slightly shifted toward higher Bragg angles when the Cr substitutionally replaced the Zn in the ZnO crystals. The films exhibited a uniformly distributed nano grains with a columnar structure. |
| first_indexed | 2024-03-06T15:24:34Z |
| format | Thesis |
| id | usm.eprints-42130 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2024-03-06T15:24:34Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | usm.eprints-421302019-04-12T05:26:34Z http://eprints.usm.my/42130/ A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors al-Hardan, Naif Hammad Misshin QC1 Physics (General) Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films possessed a polycrystalline structure with a (002) dominant phase grown along the c-axis of the hexagonal structure of the ZnO. The (002) peak was slightly shifted toward higher Bragg angles when the Cr substitutionally replaced the Zn in the ZnO crystals. The films exhibited a uniformly distributed nano grains with a columnar structure. 2011-06 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf al-Hardan, Naif Hammad Misshin (2011) A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors. PhD thesis, Universiti Sains Malaysia. |
| spellingShingle | QC1 Physics (General) al-Hardan, Naif Hammad Misshin A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title | A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_full | A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_fullStr | A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_full_unstemmed | A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_short | A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_sort | study on the fabrication and characterization of sputtered cr doped zno thin film gas sensors |
| topic | QC1 Physics (General) |
| url | http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf |
| work_keys_str_mv | AT alhardannaifhammadmisshin astudyonthefabricationandcharacterizationofsputteredcrdopedznothinfilmgassensors AT alhardannaifhammadmisshin studyonthefabricationandcharacterizationofsputteredcrdopedznothinfilmgassensors |