Fabrication Of Two Dimensional Silicon Photonic Crystal
Photonic crystals are materials with a periodicity in refractive index. When electromagnetic waves with a wide range of frequencies propagate through these materials, certain range of frequencies is prohibited. The prohibited frequencies are known as photonic bandgap. In this study, a two dimensiona...
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| Format: | Thesis |
| Language: | English |
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2010
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| Online Access: | http://eprints.usm.my/42664/1/SIN_YEW_KEONG.pdf |
| _version_ | 1825834662004523008 |
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| author | Sin, Yew Keong |
| author_facet | Sin, Yew Keong |
| author_sort | Sin, Yew Keong |
| collection | USM |
| description | Photonic crystals are materials with a periodicity in refractive index. When electromagnetic waves with a wide range of frequencies propagate through these materials, certain range of frequencies is prohibited. The prohibited frequencies are known as photonic bandgap. In this study, a two dimensional silicon photonic crystal is fabricated by microfabrication method. Electron beam lithography and etching process are important processes in this method. Hence, preliminary works on optimization parameters in electron beam lithography are necessary. |
| first_indexed | 2024-03-06T15:26:03Z |
| format | Thesis |
| id | usm.eprints-42664 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2024-03-06T15:26:03Z |
| publishDate | 2010 |
| record_format | dspace |
| spelling | usm.eprints-426642019-04-12T05:26:57Z http://eprints.usm.my/42664/ Fabrication Of Two Dimensional Silicon Photonic Crystal Sin, Yew Keong QC1 Physics (General) Photonic crystals are materials with a periodicity in refractive index. When electromagnetic waves with a wide range of frequencies propagate through these materials, certain range of frequencies is prohibited. The prohibited frequencies are known as photonic bandgap. In this study, a two dimensional silicon photonic crystal is fabricated by microfabrication method. Electron beam lithography and etching process are important processes in this method. Hence, preliminary works on optimization parameters in electron beam lithography are necessary. 2010-03 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/42664/1/SIN_YEW_KEONG.pdf Sin, Yew Keong (2010) Fabrication Of Two Dimensional Silicon Photonic Crystal. PhD thesis, Universiti Sains Malaysia. |
| spellingShingle | QC1 Physics (General) Sin, Yew Keong Fabrication Of Two Dimensional Silicon Photonic Crystal |
| title | Fabrication Of Two Dimensional Silicon Photonic Crystal |
| title_full | Fabrication Of Two Dimensional Silicon Photonic Crystal |
| title_fullStr | Fabrication Of Two Dimensional Silicon Photonic Crystal |
| title_full_unstemmed | Fabrication Of Two Dimensional Silicon Photonic Crystal |
| title_short | Fabrication Of Two Dimensional Silicon Photonic Crystal |
| title_sort | fabrication of two dimensional silicon photonic crystal |
| topic | QC1 Physics (General) |
| url | http://eprints.usm.my/42664/1/SIN_YEW_KEONG.pdf |
| work_keys_str_mv | AT sinyewkeong fabricationoftwodimensionalsiliconphotoniccrystal |