Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
Cerium oxide (CeO2) thin films have been formed on silicon (Si) substrates via metal organic decomposition route in order to resolve the usefulness of this oxide as an alternative gate dielectric for Si-based metal-oxide-semiconductor (MOS) applications. Salts of cerium(III) nitrate and ceriu...
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| Format: | Thesis |
| Language: | English |
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2009
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| Online Access: | http://eprints.usm.my/42928/1/Farah_Anis_Binti_Jasni24.pdf |