Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling a...
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| Natura: | Tesi |
| Lingua: | English |
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2013
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| Accesso online: | http://eprints.usm.my/46067/1/Muhammad%20Syakir%20Bin%20Harun.pdf |