Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer
This work will describe the influence of molarity and time of potassium hydroxide etching on Al-rich AlGaN layer. With potassium hydroxide (KOH) molarity of 5 mol/L, no significant change on the pores formation was observed for 5 and 10 minutes of etching. Nonetheless, there was a possibilty that s...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2020
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| Subjects: | |
| Online Access: | http://eprints.usm.my/49066/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2060.pdf |