Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film
Calcium copper titanate (CCTO) thin film with high dielectric permittivity (ε), low tangent loss (tan δ) and have high temperature phase stability up to 300 °C is very importance for several advanced microelectronic applications. The electrical and optical properties are depended on the structural a...
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| Format: | Monograph |
| Language: | English |
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Universiti Sains Malaysia
2017
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| Online Access: | http://eprints.usm.my/52441/1/Effect%20Of%20Deposition%20Temperature%20And%20Type%20Of%20Substrates%20On%20Structural%2C%20Surface%20Morphology%20And%20Optical%20Properties%20Of%20Rf%20Magnetron%20Sputtered%20Ccto%20Thin%20Film_Cheah%20Wei%20Kian_B1_2017.pdf |