| Summary: | There have many applications in MEMS can be developed by a PZT actuator such
as in data storage system, medical and RF system. This project focuses on high density
data storage system which the PZT actuator namely microheater was placed. The main
function of this microheater in high density data storage system is to write and read a
data. Thermal performance of this microheater can be measured from experimental or
finite element analysis. When a voltage or current was applied on microheater a
displacement, resonant frequency and temperatures can be determined. So to evaluate a
thermal performance of this microheater, a thermal analysis of this microheater has been
done by ANSYS simulation. With the simulation, the tip temperature for thermal writing
step at the fixed time can be determined and the time period for thermal cooling step
closed to the room temperature, 27 0
C can be predicted. The parametric studies have been
done to compare the thermal performance of others parameter of the microheater. The
first parametric studies; varied cone tip size, which the cone tip is smaller than cone tip
size in verification analysis. Decrease in cone tip size causes the highest tip temperature
for thermal writing step due to small size of light doped region. The second parametric
studies; varied the shape of microheater and microcantilever give the lowest tip
temperature for thermal writing step due to size of doped region and cone tip are more
than other two analyses. The longest time period for thermal cooling step give a tip
temperature near the room temperature. From the graph, thermal time constant can been
found. The thermal time constant has desired to identify a thermal behavior of
microheater which the smallest time constant, the fastest of microheater write or read a
data. The MEMS fabrication and packaging also can be applied when a thermal
performance of microheater has been recognized.
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