Characterization Of Multilayer ZnO/METAL/ZnO As pH Sensor
This study focused on the synthesis and characterisation of ZnO/metal/ZnO multilayer thin films for extended gate field effect transistors in pH sensor devices by using a physical method. Multilayer structures ZnO/metal/ZnO and ZnO single layer were deposited on glass substrate via radio frequency...
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
2019
|
| Subjects: | |
| Online Access: | http://eprints.usm.my/61964/1/Characterization%20of%20multilayer%20cut.pdf |
| Summary: | This study focused on the synthesis and characterisation of ZnO/metal/ZnO
multilayer thin films for extended gate field effect transistors in pH sensor devices by
using a physical method. Multilayer structures ZnO/metal/ZnO and ZnO single layer were deposited on glass substrate via radio frequency and direct current magnetron sputtering. |
|---|