Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films
The growth of highly crystalline c-plane AlN 〈002〉 is extremely difficult, entailing high temperature and ultrahigh vacuum condition. In sputtering technique, the addition of nitrogen into argon sputtering gas can significantly assist the formation of AlN 〈002〉 at low temperature. We incorporated pu...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023
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| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/10105/1/J16245_20d070df8d4da144f68593929aa9833e.pdf |