Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation
Non-crystalline, transparent methylsilsesquioxane–titania hybrid films for application in micropatterning were prepared from methyltriethoxysilane and titanium tetrabutoxide by the sol–gel method. The hybrid films were heat-treated at 100 8C for 1 h and then irradiated with UV light using an ultrahigh...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Wiley
2012
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| Online Access: | http://eprints.uthm.edu.my/4920/1/AJ%202017%20%28243%29%20Micropatterning%20of%20non-crystalline.pdf |
| _version_ | 1825709932145541120 |
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| author | Ainuddin, Ainun Rahmahwati Hakiri, Norio Muto, Hiroyuki Matsuda, Atsunori |
| author_facet | Ainuddin, Ainun Rahmahwati Hakiri, Norio Muto, Hiroyuki Matsuda, Atsunori |
| author_sort | Ainuddin, Ainun Rahmahwati |
| collection | UTHM |
| description | Non-crystalline, transparent methylsilsesquioxane–titania hybrid films for application in micropatterning were prepared from methyltriethoxysilane and titanium tetrabutoxide by the sol–gel method. The hybrid films were heat-treated at 100 8C for 1 h and then irradiated with UV light using an ultrahigh-pressure mercury lamp. The refractive index of the film increased as the amount of incorporated TiO2 increased. No changes in hardness were observed for the films lacking TiO2 during UV irradiation, whereas adding a small amount of TiO2 caused the hardness to increase significantly following UV irradiation. These changes in the physical properties of the films with UV irradiation were caused by the cleavage of Si–C bonds in the films induced by the photocatalytic effect of TiO2.On the basis of the changes in surface profiles, and optical, chemical, and mechanical properties induced by UV irradiation, it is concluded that the methylsilsesquioxane–titania films are promising for micropatterning by photolithography. |
| first_indexed | 2024-03-05T21:49:54Z |
| format | Article |
| id | uthm.eprints-4920 |
| institution | Universiti Tun Hussein Onn Malaysia |
| language | English |
| last_indexed | 2024-03-05T21:49:54Z |
| publishDate | 2012 |
| publisher | Wiley |
| record_format | dspace |
| spelling | uthm.eprints-49202021-12-23T08:27:25Z http://eprints.uthm.edu.my/4920/ Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation Ainuddin, Ainun Rahmahwati Hakiri, Norio Muto, Hiroyuki Matsuda, Atsunori QC Physics TJ Mechanical engineering and machinery Non-crystalline, transparent methylsilsesquioxane–titania hybrid films for application in micropatterning were prepared from methyltriethoxysilane and titanium tetrabutoxide by the sol–gel method. The hybrid films were heat-treated at 100 8C for 1 h and then irradiated with UV light using an ultrahigh-pressure mercury lamp. The refractive index of the film increased as the amount of incorporated TiO2 increased. No changes in hardness were observed for the films lacking TiO2 during UV irradiation, whereas adding a small amount of TiO2 caused the hardness to increase significantly following UV irradiation. These changes in the physical properties of the films with UV irradiation were caused by the cleavage of Si–C bonds in the films induced by the photocatalytic effect of TiO2.On the basis of the changes in surface profiles, and optical, chemical, and mechanical properties induced by UV irradiation, it is concluded that the methylsilsesquioxane–titania films are promising for micropatterning by photolithography. Wiley 2012 Article PeerReviewed text en http://eprints.uthm.edu.my/4920/1/AJ%202017%20%28243%29%20Micropatterning%20of%20non-crystalline.pdf Ainuddin, Ainun Rahmahwati and Hakiri, Norio and Muto, Hiroyuki and Matsuda, Atsunori (2012) Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation. Physica Status Solidi A. pp. 1-7. ISSN 1862-6300 http://dx.doi.org/10.1002/pssa.201228139 |
| spellingShingle | QC Physics TJ Mechanical engineering and machinery Ainuddin, Ainun Rahmahwati Hakiri, Norio Muto, Hiroyuki Matsuda, Atsunori Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation |
| title | Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation |
| title_full | Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation |
| title_fullStr | Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation |
| title_full_unstemmed | Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation |
| title_short | Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation |
| title_sort | micropatterning of non crystalline methylsilsesquioxane titania hybrid films based on their structural changes with uv irradiation |
| topic | QC Physics TJ Mechanical engineering and machinery |
| url | http://eprints.uthm.edu.my/4920/1/AJ%202017%20%28243%29%20Micropatterning%20of%20non-crystalline.pdf |
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