Design and analysis of silicon nanowire array based on SAW gas sensor
Estimating the sensitivity of a surface acoustic wave (SAW) gas sensor accurately and effectively is essential for gas sensing applications. In this paper, the sensitivity of a SAW gas sensor without sensitive material, as well as with a sensing layer comprised of silicon and silicon nanowire arrays...
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| Format: | Book Section |
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Springer Science and Business Media Deutschland GmbH
2022
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Design and analysis of silicon nanowire array based on SAW gas sensor
Published 2022
Conference or Workshop Item